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Electromagnetic Right Angle Vacuum Valve For Semiconductor

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Scope Of Application: 10⁵~6.7×10⁻⁷Pa
Valve Leakage Rate: ≤1.3 ×10⁻⁷Pa.L/S
Medium Temperature: -30~+150ºC
Coil Temperature Rise: ≤50 ºC
Opening And Closing Time: ≤1s
Power Supply: Generally: AC220V, AC110V; Optional: DC24V, DC12V
Installation Status: Any
Working Frequency: ≤6 times/min
Power Consume: Instant Start ≤ 2000W, Holding ≤ 10W
Pressure Difference At Opening: DN16~40: ≤0.11MPa
Body & Disc Material: Stainless Steel
Seal: Bellows
Availability:
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Description

Developed for vacuum system engineers, semiconductor manufacturing specialists, and precision process procurement teams, our Electromagnetic Right Angle Vacuum Valve (also known as electromagnetic high vacuum angle valve) is an advanced flow control solution engineered for exceptional performance in high and ultra-high vacuum environments. Built to meet the strictest cleanliness and reliability standards for critical industrial processes, this valve delivers fast, precise on-off control of vacuum airflow, with integrated vacuum disinfection capabilities to support sterile, contamination-free operations.

Key Specifications at a Glance

Scope Of Application

105~6.7×10-7Pa

Valve Leakage Rate

≤1.3×10-7Pa.L/S

Medium Temperature

-30~+150ºC

Coil Temperature Rise

≤50ºC

Opening And Closing Time

≤1s

Power Supply

Generally:AC220V, AC110V,

Optional: DC24V, DC12V

Installation Status

Any

Working Frequency

≤6 times/min

Power Consume

Start An Instant ≤ 2000w, Maintain ≤ 10w.

Pressure Difference At Opening

DN16~40:≤0.11MPa

Body、Disc

Stainless Steel

Seal

Bellows

Product Overview & Working Principle

This electromagnetic right angle vacuum valve is a GDC-J series solenoid-actuated control device, purpose-built to connect or cut off vacuum airflow in vacuum pipelines with unmatched precision. The valve adopts a right-angle flow path design, with an electromagnetic actuation system as its core driving component. When energized, the solenoid coil generates electromagnetic force to lift the valve disc, opening the flow path for unobstructed airflow within the vacuum system; when de-energized, the valve disc resets rapidly via spring force, tightly closing the flow path to isolate the vacuum section. The integrated bellows seal structure fully isolates the internal vacuum cavity from the external actuator, eliminating internal leakage and ensuring long-term stable vacuum degree maintenance. The valve’s built-in vacuum disinfection function effectively eliminates contaminants in the vacuum chamber, maintaining a sterile, high-cleanliness environment for mission-critical processes.

Electromagnetic Right Angle Vacuum Valve For Semiconductor

Core Advantages & Design Features

Ultra-High Vacuum Compatibility & Zero-Leakage Sealing

Engineered for high and ultra-high vacuum environments, the valve delivers industry-leading low leakage rates, with a bellows seal structure that eliminates internal and external leakage risks, ensuring stable vacuum degree control even during long-term continuous operation.

Ultra-Fast Response & Precision Flow Control

With a full open/close cycle of ≤1 second, the valve provides immediate response to vacuum system control signals, enabling accurate pressure regulation and preventing damage to sensitive components within the vacuum system.

Low Power Consumption & Low Temperature Rise Design

An optimized control circuit limits coil temperature rise to ≤50℃ during continuous operation, with ultra-low holding power consumption (≤10W), reducing energy costs and extending the service life of the solenoid coil.

High-Cleanliness Construction & Integrated Disinfection

Full stainless steel wetted parts and built-in vacuum disinfection technology effectively sterilize the vacuum chamber and eliminate contaminants, making it ideal for high-cleanliness and sterile processes in semiconductor and biopharmaceutical industries.

Universal Adaptability & Simplified Installation

Supports a wide range of power supply options, compatible with 50Hz/60Hz power sources, and can be installed in any orientation without performance impact, enabling seamless integration into existing vacuum systems.

Typical Application Industries

This Electromagnetic Right Angle Vacuum Valve is widely deployed in industrial sectors with strict vacuum and cleanliness requirements, including semiconductor manufacturing, biopharmaceutical and biotechnology, vacuum coating equipment, scientific research laboratories, vacuum heat treatment, electronic component production, solar panel manufacturing, and industrial vacuum packaging. It is the core control component for all types of high-vacuum pipeline systems.

Why Choose Pioneer Valve?

Pioneer Valve is a trusted industrial valve supplier specializing in high-precision vacuum valves for critical industrial processes. Every electromagnetic high vacuum angle valve we produce undergoes rigorous vacuum performance testing and leakage inspection prior to delivery, ensuring full compliance with global industry standards. Our in-house R&D team can fully customize valve parameters to match your unique vacuum system requirements, from power supply specifications to size and material options. We provide full-cycle technical support, from pre-sales selection to after-sales maintenance, delivering reliable, long-lasting vacuum control solutions for your high-precision industrial operations.

FAQs

Can this valve be installed in any orientation?

Yes. The valve is engineered to support installation in any direction, with no impact on its performance or sealing capability, making it easy to adapt to complex vacuum system layouts.

Do you offer low-voltage power supply options for this vacuum valve?

Yes. In addition to standard AC220V and AC110V power supplies, we offer optional DC24V and DC12V configurations to meet the needs of low-voltage control systems.

What is the maximum working frequency of this valve?

The maximum recommended working frequency is ≤6 times per minute, which fully meets the control needs of most industrial vacuum systems.

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